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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Improved Ion Beam Incident Angle Control for Varian E220 and E500 Implanters
Hendrix, David, Zhao, Zhiyong, Liebert, Reuel, Gifford, Ken, Mitchell, PierreVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401547
File:
PDF, 420 KB
english, 2006