Modified high frequency probe approach for diagnostics of...

  • Main
  • 2019 / 10
  • Modified high frequency probe approach for diagnostics of...
Plasma Sources Science and Technology 2019 / 10

Modified high frequency probe approach for diagnostics of highly reactive plasma

Sezemsky, Petr, Stranak, Vitezslav, Kratochvil, Jiri, Cada, Martin, Hippler, Rainer, Hrabovsky, Miroslav, Hubicka, Zdenek
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab506c
Date:
October, 2019
File:
PDF, 1.87 MB
english, 2019
Conversion to is in progress
Conversion to is failed