[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A MEMS Gravimeter Qualified for Earth Tides Measurement
Tang, ShiHao, Liu, HuaFeng, Yan, ShiTao, Xu, XiaoChao, Wu, WenJie, Tu, Liang ChengYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808444
File:
PDF, 1.15 MB
english, 2019