Optically read Coriolis vibratory gyroscope based on a silicon tuning fork
Lavrik, N. V., Datskos, P. G.Volume:
5
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-019-0087-9
Date:
December, 2019
File:
PDF, 2.34 MB
english, 2019