Ion-induced Auger electrons contrast on cross-beam systems

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Semiconductor Science and Technology 2019 / 11

Ion-induced Auger electrons contrast on cross-beam systems

Pereyaslavtsev, Alexander, Naumkin, Alexander V.
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Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab541f
Date:
November, 2019
File:
PDF, 28.45 MB
english, 2019
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