Piezoelectric Micromachined Ultrasonic Transducers with a Cost-Effective Bottom-Up Fabrication Scheme for Millimeter-Scale Range Finding
Feng, Guo-Hua, Liu, Hua-JinVolume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19214696
Date:
October, 2019
File:
PDF, 5.57 MB
english, 2019