Characterizing AFM Tip Lateral Positioning Variability...

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IEEE Transactions on Nanotechnology 2019

Characterizing AFM Tip Lateral Positioning Variability Through Non-vector Space Control-based Nanometrology

Sun, Zhiyong, Cheng, Yu, Xi, Ning, Yang, Ruiguo, Yang, Yongliang, Chen, Liangliang, Song, Bo
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Year:
2019
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/TNANO.2019.2950267
File:
PDF, 1.87 MB
english, 2019
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