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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Full-System Simulation of Airborne Capacitive Mems Transducers Operating in the Audible and Ultrasonic Regime
Bosetti, Gabriele, Manz, Johannes, Krumbein, Ulrich, Schrag, GabrieleYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808590
File:
PDF, 1.55 MB
english, 2019