[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Multi-wavelength Reflectivity Monitoring on Growth of AlN on Si
Iyechika, Yasushi, Tsukui, Masayuki, Miyano, Kiyotaka, Takahashi, HideshiYear:
2019
Language:
english
DOI:
10.1109/iciprm.2019.8819325
File:
PDF, 387 KB
english, 2019