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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - MARLOWE Simulation of High Energy Ions into Single Crystalline Silicon Substrates
Sasaki, Haruka, Kawasaki, Yoji, Ninomiya, Shiro, Sugitani, MichiroYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807932
File:
PDF, 566 KB
english, 2018