[IEEE 2019 IEEE 32nd International Conference on Micro...

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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Common Flexible Channel Structure for Integration of Three-Axis Force Sensor and Soft Micro Actuator

Otake, Shohei, Mori, Fuminari, Konishi, Satoshi
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Year:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870621
File:
PDF, 3.42 MB
english, 2019
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