[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification
Lee, Jaesung, Matheny, Matthew H., Roukes, Michael L., Feng, Philip X.-L.Year:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870624
File:
PDF, 1.29 MB
english, 2019