[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - NIR and MIR Absorption of Ultra-Black Silicon (UBS). Application to High Emissivity, All-Silicon, Light Source

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