[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - A Geometrically Predetermined Eighth Order Nonlinear Flexure for Extending the Stable Travel Range of the Electrostatic Actuator
Xiang, Xiaojian, Dai, Xuhan, Kang, Kai, Sun, Shi, Ding, GuifuYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870662
File:
PDF, 2.21 MB
english, 2019