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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic/Vertical Integration of Piezo-Resistive Tactile Sensor and Inductive Proximity Sensor Using CMOS-MEMS Technology
Lee, Jia-Horng, Yeh, Sheng-Kai, Fang, WeileunYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870664
File:
PDF, 2.82 MB
english, 2019