![](/img/cover-not-exists.png)
[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology
Veltkamp, Henk-Willem, Zhao, Yiyuan, de Boer, Meint J., Sanders, Remco G.P., Wiegerink, Remco J., Lotters, Joost C.Year:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870667
File:
PDF, 2.55 MB
english, 2019