![](/img/cover-not-exists.png)
[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Room-Temperature Printing of Micron-Scale-Wide Metal Lines for Microsystems via Atmospheric Microsputtering
Kornbluth, Yosef, Mathews, Richard, Parameswaran, Lalitha, Racz, Livia, Velasquez-Garcia, Luis FernandoYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870670
File:
PDF, 3.09 MB
english, 2019