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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Low Voltage Haptic Slider Built Using Sol-Gel Thin-Film PZT Actuators Reported on Glass
Casset, Fabrice, le Rhun, Gwenael, Neff, Baptiste, Desloges, Brigitte, Dieppedale, Christel, Fanget, StephaneYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870715
File:
PDF, 964 KB
english, 2019