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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Study and Application of In-Situ Phosphorus Doped Thick Polysilicon Films at Low Temperature for Post CMOS-MEMS Integration
Chaung, Ian, Michael, Aron, Kwok, Chee YeeYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870724
File:
PDF, 2.45 MB
english, 2019