![](/img/cover-not-exists.png)
[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sensitivity Improvement of MEMS Thermal Wind Senor Using Vertical Stacking Thermistors
Wang, Zhenjun, Yi, Zhenxiang, Ye, Yizhou, Qin, Ming, Huang, Qing-anYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870774
File:
PDF, 2.02 MB
english, 2019