[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate
Zhang, Jie, Xing, Yan, Gosalvez, Miguel A., Qiu, Xiaoli, Lin, Xiaohui, Zhang, ChibinYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870817
File:
PDF, 3.47 MB
english, 2019