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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sealed Cavity Pressure Evaluation from 1 Pa to Over 10 KPA Using Thin Diaphragm for MEMS Vacuum Packaging
al Farisi, Muhammad Salman, Hirano, Hideki, Tanaka, ShujiYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870823
File:
PDF, 815 KB
english, 2019