[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - High-Overtone Bulk Diffraction Wave Gyroscope
Pinrod, Visarute, Davaji, Benyamin, Lal, AmitYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870827
File:
PDF, 1.65 MB
english, 2019