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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Palladium Hydrogen Sensor with Perfectly Aligned and Highly Uniform Nanogap Arrays
Lee, Jae-Shin, Chung, Myung-Kun, Choi, Kwang-Wook, Yoo, Jae-Young, Yoon, Jun-BoYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870836
File:
PDF, 2.03 MB
english, 2019