A self-calibration method with high-accuracy and low-cost for large-area motion stage based on digital grating projection mode
Huang, Shengzhou, Li, Mujun, Wang, Lei, Su, Yongsheng, Liang, YiVolume:
12
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/1882-0786/ab4f58
Date:
December, 2019
File:
PDF, 672 KB
english, 2019