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Quantitative thickness measurement of polarity-inverted piezoelectric thin-film layer by scanning nonlinear dielectric microscopy
Odagawa, Hiroyuki, Terada, Koshiro, Tanaka, Yohei, Nishikawa, Hiroaki, Yanagitani, Takahiko, Cho, YasuoVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.10PF18
Date:
October, 2017
File:
PDF, 695 KB
english, 2017