Effective Passivation of Black Silicon Surfaces via...

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physica status solidi (RRL) - Rapid Research Letters 2019 / 10

Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer

Özkol, Engin, Procel, Paul, Zhao, Yifeng, Mazzarella, Luana, Medlin, Rostislav, Šutta, Pavol, Isabella, Olindo, Zeman, Miro
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Language:
english
Journal:
physica status solidi (RRL) – Rapid Research Letters
DOI:
10.1002/pssr.201900087
Date:
October, 2019
File:
PDF, 1.75 MB
english, 2019
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