Plasma Enhanced Chemical Vapor Deposition of...

Plasma Chemistry and Plasma Processing 2019 / 10

Plasma Enhanced Chemical Vapor Deposition of Poly(Cyclohexyl Methacrylate) as a Sacrificial Thin Film

Yartaşı, Yunus, Karaman, Mustafa
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Language:
english
Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-019-10038-1
Date:
October, 2019
File:
PDF, 1.05 MB
english, 2019
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