Effects of Fluorination of Carbon Film and Annealing Conditions on Side Leakage Current and Current Breakdown Time of SiO2/Graphene/Cu/Ti/SiO2/Si specimens
Chang, Chang-Shuo, Cheng, Han-Che, Han, Chang-Fu, Lai, Chao-Sung, Lin, Jen-FinLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.109037
Date:
October, 2019
File:
PDF, 6.73 MB
english, 2019