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An overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical circuits, Displacement and Force estimation.
LISELI, Joel BAFUMBA, AGNUS, Joel, LUTZ, Philippe, RAKOTONDRABE, MickyYear:
2019
Language:
english
Journal:
IEEE Transactions on Instrumentation and Measurement
DOI:
10.1109/TIM.2019.2950760
File:
PDF, 5.10 MB
english, 2019