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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Energy Transfer Control of Mode Cooling Induced by Capacitive Nonlinear Coupling in MEMS Resonator
Miao, Tongqiao, Zhou, Xin, Ou, Fenlan, Lu, Kuo, Zhang, Yongmeng, Wu, Xuezhong, Xiao, DingbangYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870697
File:
PDF, 1.17 MB
english, 2019