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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly Sensitive Angular Accelerometer Utilizing Piezoresistive Cantilever and Spiral Liquid Channel
Jo, Byeongwook, Takahashi, Hidetoshi, Takahata, Tomoyuki, Shimoyama, IsaoYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870806
File:
PDF, 1.69 MB
english, 2019