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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State
Zhang, Xiaojing, Shi, Jianhao, Zhu, Xi, Wang, Yipin, Chen, Jiaming, Ding, Guifu, Yang, ZhuoqingYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870812
File:
PDF, 2.08 MB
english, 2019