[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35\boldsymbol{\mu}\mathbf{m}$ CMOS MEMS Technology

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