Study of TiN and TaN Underlayer Properties and Their...

IEEE Transactions on Semiconductor Manufacturing 2019 / 11 Vol. 32; Iss. 4

Study of TiN and TaN Underlayer Properties and Their Influence on W Growth

Pancharatnam, S., Rodriguez, G., Wang, W., Karve, G., Wynne, J., Mendoza, B., DeVries, S., Pujari, R. N., Breton, M., Carr, A., White, L.
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Volume:
32
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2019.2945916
Date:
November, 2019
File:
PDF, 3.38 MB
english, 2019
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