Optical properties of the crystalline silicon wafers...

Optical properties of the crystalline silicon wafers described using the universal dispersion model

Franta, Daniel, Vohánka, Jiří, Bránecký, Martin, Franta, Pavel, Čermák, Martin, Ohlídal, Ivan, Čech, Vladimír
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5122284
Date:
November, 2019
File:
PDF, 2.48 MB
english, 2019
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