Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 11 Vol. 37; Iss. 6
Optical properties of the crystalline silicon wafers described using the universal dispersion model
Franta, Daniel, Vohánka, Jiří, Bránecký, Martin, Franta, Pavel, Čermák, Martin, Ohlídal, Ivan, Čech, VladimírVolume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5122284
Date:
November, 2019
File:
PDF, 2.48 MB
english, 2019