Real-Time Correction and Stabilization of Laser Diode...

Sensors 2019 / 10 Vol. 19; Iss. 20

Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology

Cai, Yindi, Feng, Baokai, Sang, Qi, Fan, Kuang-Chao
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Volume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19204587
Date:
October, 2019
File:
PDF, 6.82 MB
english, 2019
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