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Molecular model of phenolic polymer dissolution in photolithography
Lewis W. Flanagin, Vivek K. Singh, C. Grant WillsonVolume:
37
Year:
1999
Language:
english
Pages:
11
DOI:
10.1002/(sici)1099-0488(19990815)37:163.0.co;2-5
File:
PDF, 308 KB
english, 1999