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Effect of plasmonic lens distribution on flight characteristics in rotational near-field photolithography
Ji, Jiaxin, Chen, Jiying, Xu, Pengfei, Li, Jing, Hu, Yueqiang, Meng, YonggangVolume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5113813
Date:
November, 2019
File:
PDF, 3.51 MB
english, 2019