Influences of pre-oxidation nitrogen implantation and...

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Influences of pre-oxidation nitrogen implantation and post-oxidation annealing on channel mobility of 4H-SiC MOSFETS

Fei, Chenxi, Bai, Song, Wang, Qian, Huang, Runhua, He, Zhiqiang, Liu, Hao, Liu, Qiang
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Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.125338
Date:
November, 2019
File:
PDF, 859 KB
english, 2019
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