Influences of pre-oxidation nitrogen implantation and post-oxidation annealing on channel mobility of 4H-SiC MOSFETS
Fei, Chenxi, Bai, Song, Wang, Qian, Huang, Runhua, He, Zhiqiang, Liu, Hao, Liu, QiangLanguage:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.125338
Date:
November, 2019
File:
PDF, 859 KB
english, 2019