Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection
Bertke, Maik, Xu, Jiushuai, Setiono, Andi, Kirsch, Ina, Uhde, Erik, Peiner, ErwinVolume:
30
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab4e56
Date:
January, 2020
File:
PDF, 4.23 MB
english, 2020