Design optimization of a non-orthogonal two-axis Lloyd's...

Precision Engineering 2019 / 11 Vol. 60

Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Shimizu, Yuki, Mano, Kazuki, Murakami, Hiroki, Hirota, Shunsuke, Matsukuma, Hiraku, Gao, Wei
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Volume:
60
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.07.022
Date:
November, 2019
File:
PDF, 4.73 MB
english, 2019
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