Pyrolytic carbon resonators for micromechanical thermal analysis
Nguyen, Long Quang, Larsen, Peter Emil, Larsen, Tom, Goswami, Sanjukta Bose, Villanueva, Luis Guillermo, Boisen, Anja, Keller, Stephan SylvestVolume:
5
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-019-0094-x
Date:
December, 2019
File:
PDF, 1.88 MB
english, 2019