Design and Modeling of Piezoelectrically Driven...

Journal of Microelectromechanical Systems 2019 / 10 Vol. 28; Iss. 5

Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics

Chen, Ssu-Han, Michael, Aron, Kwok, Chee Yee
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Volume:
28
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2935007
Date:
October, 2019
File:
PDF, 3.13 MB
english, 2019
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