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MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror
Isamoto, Keiji, Morosawa, Atsushi, Tei, Masataka, Fujita, Hiroyuki, Toshiyoshi, HiroshiVolume:
124
Year:
2004
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.124.213
File:
PDF, 5.60 MB
2004