Investigation of 5-nm-Thick Hf 0.5...

IEEE Journal of the Electron Devices Society 2019 Vol. 7

Investigation of 5-nm-Thick Hf 0.5 Zr 0.5 O 2 Ferroelectric FinFET Dimensions for Sub-60-mV/Decade Subthreshold Slope

Tsai, Meng-Ju, Chen, Pin-Jui, Ruan, Dun-Bao, Hou, Fu-Ju, Peng, Po-Yang, Chen, Liu-Gu, Wu, Yung-Chun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
7
Year:
2019
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2019.2942381
File:
PDF, 4.38 MB
2019
Conversion to is in progress
Conversion to is failed