[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Tunable Broadband Mems Fabry-Pérot Near Infrared Filter Based on Double-Membrane Silicon/Air Mirrors

Krammer, Christoph, Rodel, Reinhold, Huber, Christian, Schmid, Marc, Buck, Thomas
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Year:
2019
DOI:
10.1109/transducers.2019.8808416
File:
PDF, 4.41 MB
2019
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