Ultra-low Contact Resistivity of < 0.1 Ω·mm for Au-free...

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IEEE Electron Device Letters 2019

Ultra-low Contact Resistivity of < 0.1 Ω·mm for Au-free TixAly Alloy Contact on Non-recessed i-AlGaN/GaN

Fan, Meng-Ya, Yang, Gai-Ying, Zhou, Guang-Nan, Jiang, Yang, Li, Wen-Mao, Jiang, Yu-Long, Yu, Hongyu
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Year:
2019
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2019.2953077
File:
PDF, 5.18 MB
english, 2019
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