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Surface-Tensile-Stress Induced Polishing-Voids Suppression via H 2 O 2 Oxidizer Effect in Cross-Point Phase-Change-Memory-Cells
Kim, Soo-Bum, Cui, Hao, Cho, Jong-Young, Seo, Eun-Bin, Yun, Sang-Su, Son, Young-Hye, Jeong, Gi-Ppeum, Bae, Jae-Young, Park, Jin-Hyung, Kang, Sung-Goon, Park, Jea-GunVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0061911jss
File:
PDF, 1.25 MB
english, 2019