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A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser
Nazir,, Bellouard,Volume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10090611
Date:
September, 2019
File:
PDF, 4.78 MB
english, 2019